高次驻波谐振定量检测弹性板厚度的方法

基金项目:

国家自然科学基金资助项目(10774074)

教育部博士点基金资助项目(20090091120048)

详细信息

A Method for Quantitatively Evaluating Thickness of Elastic Plates Using High-Overtone Bulk Acoustic Resonance

摘要: 基于声波高次谐振的频率偏移与弹性板厚度变化间的关系, 提出一种定量检测弹性板厚度的新方法。针对最大有效机电耦合系数(k2eff(max))对应的谐振模式, 研究了弹性板厚度对最大有效机电耦合系数对应模式的谐振频率的影响, 给出修正的频率偏移与厚度变化间的关系公式。相关数值计算表明, 该方法的检测灵敏度可达50 Hz/μm, 可用于板厚及其变化的检测和板表面状况的无损评价。
- 弹性板 /
- 厚度检测 /
- 高次驻波谐振 /
- 有效机电耦合系数
Abstract: Based on the relations between the high-overtone bulk acoustic resonant frequency shifts and the changes of the elastic plate thickness, a method for the quantitative measurement of the thickness change of elastic plates was presented. For the harmonic mode with the maximum effective electromechanical coupling factor, the effects of the elastic plate thickness change on the order number of the mode were investigated, and the estimation formulae between frequency shift and thickness change were given. The numerical calculations demonstrated that the method had a high sensitivity of 50 Hz/μm, which could be used to nondestructively evaluate the thickness change and also the surface states of the elastic plates.
- Elastic plate /
- Thickness testing /
- High-overtone bulk acoustic resonance /
- Effective electromechanical coupling factor

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