无损检测在溅射靶材制造中的应用

The Application of Nondestructive Testing in Sputtering Target Manufacture

摘要: 作为关键原材料之一，电子信息产业对溅射靶材质量要求非常严格。无损检测对于确保溅射靶材质量具有重要意义。溅射靶材生产过程中应用的无损检测技术主要是X射线技术和超声波技术。无损检测工序的安排需要合理并兼顾生产效率。检测项目主要是原材料与靶材板坯内部缺陷检验和焊接质量检验。应用的超声检测技术主要是超声纵波脉冲反射C扫描技术，而且靶材制造的检验验收标准极为严格。

Abstract: The quality requirement for the sputtering target for electronic information industry and FPD industry is strictly high. The nondestructive testing added in the processes of sputtering target manufacturing is very useful to control the qualities of sputtering targets. Radiographic testing and ultrasonic testing were used for this purpose. The nondestructive testing could not reduce the production efficiency. The discontinuities in blanks, plates and weld joints were focus of attention. Ultrasonic longitudinal wave pulse reflection C-scan technology was mainly applied. The acceptance levels were extremely rigorous.