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具有择优取向性的基材表面的薄膜厚度的X射线衍射测量修正

张延志, 赖新春, 管卫军, 王勤国

张延志, 赖新春, 管卫军, 王勤国. 具有择优取向性的基材表面的薄膜厚度的X射线衍射测量修正[J]. 无损检测, 2009, 31(8): 628-630.
引用本文: 张延志, 赖新春, 管卫军, 王勤国. 具有择优取向性的基材表面的薄膜厚度的X射线衍射测量修正[J]. 无损检测, 2009, 31(8): 628-630.
ZHANG Yan-Zhi, LAI Xin-Chun, GUAN Wei-Jun, WANG Qin-Guo. Thickness Measurement of Thin Film on Polycrystalline Preferred Orientation Material by X-Ray Diffraction[J]. Nondestructive Testing, 2009, 31(8): 628-630.
Citation: ZHANG Yan-Zhi, LAI Xin-Chun, GUAN Wei-Jun, WANG Qin-Guo. Thickness Measurement of Thin Film on Polycrystalline Preferred Orientation Material by X-Ray Diffraction[J]. Nondestructive Testing, 2009, 31(8): 628-630.

具有择优取向性的基材表面的薄膜厚度的X射线衍射测量修正

基金项目: 

国防基础科研课题资助项目(A1520070073)

详细信息
    作者简介:

    张延志(1977-), 男, 硕士, 从事X射线衍射分析与研究。

  • 中图分类号: TG115.28

Thickness Measurement of Thin Film on Polycrystalline Preferred Orientation Material by X-Ray Diffraction

  • 摘要: 根据薄膜对X射线的吸收效应, 利用X射线衍射方法可测量出多晶基材表面的薄膜厚度。但试验结果显示, 基材的择优取向效应对薄膜厚度的测量影响显著。根据理论分析, 提出了择优取向修正方法。在对X射线衍射数据进行择优取向修正后, 利用最小二乘法对修正后的数据进行拟合。拟合结果显示, 该方法可以有效地对基材的择优取向效应进行修正, 从而获得较为准确的薄膜厚度值。
    Abstract: Thickness measurement based on the absorption of X-rays in film had been tested on polycrystalline substrate using X-ray diffraction. The diffraction angle (2θ) had fixed and incidence angles had changed continuously during collection data. The intensity of substrate reflection was measured to count the thickness of film. The result indicated the preferred orientation of substrate was effective on the account observably. A technique was found to correct the effect of preferred orientation.
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出版历程
  • 收稿日期:  2008-10-13
  • 刊出日期:  2009-08-09

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