Abstract: The defect quantification and location is a problem during the creep wave inspection technology applying on the surface and subsurface of austenitic stainless steel weld and dissimilar metal weld. This paper introduces the theory of creep wave inspection, creep wave probes and blocks of several researching projects. And this paper summarizes the detail method of applying the creep wave inspection technology with integrating with much experimental data. The applying methods include adjusting inspection system, sensitivity setting , defect locating and sizing. The reliability of creep wave inspection technology applying on the surface and subsurface of austenitic stainless steel weld and dissimilar metal weld was testified with validating the technology.