法兰氦质谱检漏技术
Helium Mass Spectrometer Leak Testing for the Flange
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摘要: 改进并设计加工了法兰检漏专用吸枪和喷枪。研究和提出了充压真空法与氦罩法对法兰整体检漏的方法,利用法兰多道密封结构形成的环状空腔作为检漏真空室,进一步提高了法兰检漏的灵敏度与可靠性。Abstract: The special sniffing probe and spray probe for leak testing of flange were designed and made. The inside-out testing and hood testing, two overall leak detection methods, were made research on and established. In these methods, the cavity which was ringed by multi-layer tight structures in the flange was used as the vacuum cave in leak detecting. By these means, the sensitivity and reliability of the leak detection for the flange were further improved.