Abstract: The basic principles of eddy current array inspecting method were analyzed at first. Then a simulation model of an eddy current array probe was established based on finite element method. The output characteristics of the probe while inspecting cracks were obtained by the model. In addition, the influences of exciting frequency on output characteristics were also considered. It showed that there would be a change on amplitude and phase when a crack appeared below the footprint of sensing coil in metal structures. As the frequency increased, the difference between the sensing coils’ output become obvious. However, the difference began to decrease while the frequency was above 3 MHz approximately. These results shall provide a reference for further research and application of the probe.