Abstract: A certain type of residual stress measurement instrument was analyzed,based on orthogonal experimental arrangement, mean, variance and range different analysis was used to analyze the influence of three factors such as the number of angle ψ, the diameter of the collimator and the swing angle on the accuracy, stability and measurement time of the residual stress measurement data. Experimental results show that for the accuracy and stability of the measured data, the number of angle ψ had a greater impact, and meanwhile the swing angle had the smallest impact. For measurement efficiency, the influence of the number of angles ψ was the largest, and the influence of the collimator diameter and swing angle was small. To the smooth plane specimens of steel and cast iron, the accuracy, stability and efficiency of the measurement data were high when the number of angle ψ was 9, the diameter of the collimator was 3 mm, and the swing angle was 3°.