Abstract: As a relatively mature nondestructive testing method, eddy current testing has received some research interest on the optimization and improvement of some parameters of the sensor, but on the whole it lacks overall and systematic analysis. As a kind of relatively new software, CIVA software is more professional and simpler in terms of nondestructive testing and simulation. In this paper, we established the 3D defect simulation model of different materials, and designed the corresponding orthogonal experiment. Through visual analysis, analysis of variance and contribution rate, the influence degree of each factor on the defect detection result was explored. We determined the variation law of the contribution rate of the main influencing factors in the detection of different material defects, and proposed the optimal probe size parameters. Finally, the debugging sequence of the different parameters recommended during the actual debugging process is given.