Application and Development of Phase Measuring Profilometry

Since 1980s, Phase Measuring Profilometry was developed sharply, with the development and application of laser technology. The method was very popular with many advantages such as non-contact, full-field measurement, high accuracy and sensitivity, automation. The developing trend and application status of Phase Measuring Profilometry in the world were described. The principle of measuring method was introduced, and the existing methods were analyzed and compared.